Solution

 

 

 

 

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Rapid Thermal Processing

 

Process Probe 1530 Process Probe 1535

Process Probe 1530

  • Check offsets from control setpoints (1530 / 1535)
  • Verify ramp rate and cycle time (1530 / 1535)
  • Examine control parameter effects on overshoot and steady state temperature (1530 / 1535)
  • Optimize lamp bank power settings 1530 / 1535)
  • Measure thermal non-uniformity at any process temperature - instantaneous as well as integrated over time (1530 / 1535)
  • Calibrate pyrometers and other in-process temperature sensors (1530 / 1535)

Process Probe 1535

  • Check offsets from control setpoints (1530 / 1535)
  • Verify ramp rate and cycle time (1530 / 1535)
  • Examine control parameter effects on overshoot and steady state temperature (1530 / 1535)
  • Optimize lamp bank power settings (1530 / 1535)
  • Measure thermal non-uniformity at any process temperature - instantaneous as well as integrated over time (1530 / 1535)
  • Calibrate pyrometers and other in-process temperature sensors (1530 / 1535)

 

Other Processes Supported
1530 PVD 1535 HOT WALL
MCVD/MOCVD   LPCVD HOT WALL
EPI   RTP
  PECVD    
  LPCVD/SACVD    
  SOD