Process
Probe 1530
- Check offsets from control setpoints (1530 / 1535)
- Verify ramp rate and cycle time (1530 / 1535)
- Examine control parameter effects on overshoot and steady state temperature (1530 / 1535)
- Optimize lamp bank power settings 1530 / 1535)
- Measure thermal non-uniformity at any process temperature - instantaneous as well as integrated
over time (1530 / 1535)
- Calibrate pyrometers and other in-process temperature sensors (1530 / 1535)
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Process
Probe 1535
- Check offsets from control setpoints (1530 / 1535)
- Verify ramp rate and cycle time (1530 / 1535)
- Examine control parameter effects on overshoot and steady state temperature (1530 / 1535)
- Optimize lamp bank power settings (1530 / 1535)
- Measure thermal non-uniformity at any process temperature - instantaneous as well as integrated over time (1530 / 1535)
- Calibrate pyrometers and other in-process temperature sensors (1530 / 1535)
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