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PECVD

 

Process Probe 1530 Process Probe 2140

Process Probe 1530

  • Measure stabilization time and uniformity (1530 / 1730)
  • Calibrate temperature setpoint (1530 / 1730)
  • Evaluate load size effects (1530 / 1730)

Process Probe 2140

  • Determine temperature during plasma processing

 

Other Processes Supported
1530 PVD 2140 APE
MCVD/MOCVD   LPCVD/SACVD
EPI   PECVD
  PECVD   PS w/BP
  LPCVD/SACVD   PVD
  SOD