At SensArray, we pride ourselves on matching the right product with any system.

APTI (Arrays of Peak Temperature Indicators) is SensArray’s first permanently indicating instrumented wafer used for measuring and profiling peak wafer temperature across the wafer.

APTI is ideally suited for plasma etch, wet processes, copper deposition and other semiconductor processes where temperatures range from 40°C to 119°C. With APTI, you can conveniently test peak wafer temperature without taking your system off-line or opening your chamber. Simply place an APTI wafer in a cassette, load it and process the APTI as you would normal production wafers.