Products
Process Probe APTI
| Wafer | |
| Diameter | 150 mm (6”) to 300 mm (12”) |
| Substrate | Bare or coated silicon |
| Sensors | |
| Temperature Range | 40°C to 185°C |
| Resolution | ±2°C to 3°C from 40°C to 48°C, ±2°C from 48°C to 78°C, ±2°C to 4°C from 78°C to 114°C ±3°C from 114°C to 185°C |
| Repeatability | ±1.0°C to ±3.0°C depending on the range |
| Number of sensing regions | Up to 9 |
| Sersor type | Irreversible melting point indicators |
| Sapphire Window | |
| Height | 0.010” (0.25 mm) above wafer surface |
| Diameter | 0.5” (12.7 mm) to 0.63” (16 mm) |
| Temperature Indicating Ranges | |
| APTI 40xx: 40°C to 97°C APTI 52xx: 52°C to 108°C APTI 60xx: 62°C to 119°C APTI 11xx: 114°C to 140°C APTI 14xx: 140°C to 185°C |
|
| Temperature Indicating Points | |
| 40°C, 42°C, 45°C, 48°C, 50°C, 52°C, 54°C, 56°C, 58°C, 60°C, 62°C, 64°C, 66°C, 68°C, 70°C, 72°C, 74°C, 76°C, 78°C, 82°C, 86°C, 89°C, 92°C, 94°C, 97°C, 100°C, 102°C, 104°C, 105°C, 108°C, 112°C, 115°C, 119°C, 129°C, 134°C, 140°C, 155°C, 163°C, 171°C, 179°C, 185°C | |
| Materials Exposed to the Process Ambient | |
| Substrate | Bare or coated silicon (provided by customer) |
| Window | Sapphire |
| Adhesive | Acrylate or epoxy |