APTI (Arrays of Peak Temperature Indicators) is a unique temperature measurement tool from SensArray for measuring and profiling peak temperature across the wafer using non-reversible temperature indicators. APTI is ideally suited for plasma, wet processes, copper deposition, and other semiconductor processes from 40° to 185°C that present environmental challenges. With APTI, you can conveniently test wafer temperature without taking your system off-line or opening your chamber.